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Nitrogen Trifluoride

NF₃

The chemical formula of nitrogen trifluoride is NF₃. It is a colorless, odorless and stable gas at normal temperature. It is a strong oxidant. High purity nitrogen trifluoride has excellent etch rate and selectivity, and it is also a very good cleaning agent. Chem can provide you with high-purity nitrogen trifluoride gas to improve your semiconductor process.

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Nitrogen Trifluoride
Nitrogen Trifluoride
NF₃

Nitrogen Trifluoride

Nitrogen trifluoride is prepared by the direct fluorination of ammonia. It may also be obtained by electrolysis of molten ammonium bifluoride or by direct combination of the elements nitrogen and fluorine using an electrical discharge at low temperatures.

GasNitrogen trifluoride
CAS No.7783-54-2
Purity99.99%

Application

LCD

With the technology development of flat panel display, customer need more specialty gases and related professional knowledge & experience, JinHong Gas provide a wide variety of specialty gas materials to flat panel display customers with application of doping, thin film deposition, etching and chamber cleaning process.

LED

In the LED industry, JinHong Gas provides specialty gases and related equipments over years. We are proud of the products performance in quality, reliability and consistency.

Semiconductors

We provide integrated circuit/semiconductor customers a variety of specialty gas, which are needed by technical process such as diffusion, lithography, deposition, etching, doping, cleaning etc.

FAQs

Cylinder: 44L Valve: CGA640 Content: 20kg
Cylinder: 440L Valve: CGA640 Content: 200kg
ISO-20ft Valve: CGA640 Content: 4000kg
ISO-40ft Valve: CGA640 Content: 8000kg

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